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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">cpomaem</journal-id><journal-title-group><journal-title xml:lang="ru">Коррозия: защита материалов и методы исследований</journal-title><trans-title-group xml:lang="en"><trans-title>Title in english</trans-title></trans-title-group></journal-title-group><publisher><publisher-name>ИФХЭ РАН</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.61852/2949-3412-2024-2-1-87-105</article-id><article-id custom-type="elpub" pub-id-type="custom">cpomaem-42</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>Статьи</subject></subj-group></article-categories><title-group><article-title>Структура и оптические свойства тонких пленок оксида алюминия (Al2O3) после контакта с парами воды и после отжига в вакууме</article-title><trans-title-group xml:lang="en"><trans-title>Structure and optical properties of aluminum oxide films (Al2O3) after heating in water vapor and vacuum</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Городецкий</surname><given-names>А. Е.</given-names></name><name name-style="western" xml:lang="en"><surname>Gorodetsky</surname><given-names>A. E.</given-names></name></name-alternatives><bio xml:lang="ru"><p>119071 Москва, Ленинский проспект, д. 31, к. 4</p></bio><bio xml:lang="en"><p>Leninsky pr. 31, 119071 Moscow</p></bio><email xlink:type="simple">aegorodetsky@mail.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Маркин</surname><given-names>А. В.</given-names></name><name name-style="western" xml:lang="en"><surname>Markin</surname><given-names>A. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>119071 Москва, Ленинский проспект, д. 31, к. 4</p></bio><bio xml:lang="en"><p>Leninsky pr. 31, 119071 Moscow</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Буховец</surname><given-names>В. Л.</given-names></name><name name-style="western" xml:lang="en"><surname>Bukhovets</surname><given-names>V. L.</given-names></name></name-alternatives><bio xml:lang="ru"><p>119071 Москва, Ленинский проспект, д. 31, к. 4</p></bio><bio xml:lang="en"><p>Leninsky pr. 31, 119071 Moscow</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Рыбкина</surname><given-names>Т. В.</given-names></name><name name-style="western" xml:lang="en"><surname>Rybkina</surname><given-names>T. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>119071 Москва, Ленинский проспект, д. 31, к. 4</p></bio><bio xml:lang="en"><p>Leninsky pr. 31, 119071 Moscow</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Неволин</surname><given-names>Ю. М.</given-names></name><name name-style="western" xml:lang="en"><surname>Nevolin</surname><given-names>Yu. M.</given-names></name></name-alternatives><bio xml:lang="ru"><p>119071 Москва, Ленинский проспект, д. 31, к. 4</p></bio><bio xml:lang="en"><p>Leninsky pr. 31, 119071 Moscow</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Залавутдинов</surname><given-names>Р. Х.</given-names></name><name name-style="western" xml:lang="en"><surname>Zalavutdinov</surname><given-names>R. Kh.</given-names></name></name-alternatives><bio xml:lang="ru"><p>119071 Москва, Ленинский проспект, д. 31, к. 4</p></bio><bio xml:lang="en"><p>Leninsky pr. 31, 119071 Moscow</p></bio><xref ref-type="aff" rid="aff-1"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru">Институт физической химии и электрохимии им. А.Н. Фрумкина РАН<country>Россия</country></aff><aff xml:lang="en">A.N. Frumkin Institute of Physical Chemistry and Electrochemistry, Russian Academy of Sciences<country>Russian Federation</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2024</year></pub-date><pub-date pub-type="epub"><day>11</day><month>04</month><year>2024</year></pub-date><volume>0</volume><issue>1</issue><fpage>87</fpage><lpage>105</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Городецкий А.Е., Маркин А.В., Буховец В.Л., Рыбкина Т.В., Неволин Ю.М., Залавутдинов Р.Х., 2024</copyright-statement><copyright-year>2024</copyright-year><copyright-holder xml:lang="ru">Городецкий А.Е., Маркин А.В., Буховец В.Л., Рыбкина Т.В., Неволин Ю.М., Залавутдинов Р.Х.</copyright-holder><copyright-holder xml:lang="en">Gorodetsky A.E., Markin A.V., Bukhovets V.L., Rybkina T.V., Nevolin Y.M., Zalavutdinov R.K.</copyright-holder><license license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://www.cpmrm.ru/jour/article/view/42">https://www.cpmrm.ru/jour/article/view/42</self-uri><abstract><p>Пленки оксида алюминия используются как слои с низким коэффициентом преломления в многослойных диэлектрических зеркалах, которые предполагается использовать в конструкциях оптических систем диагностики плазмы ИТЭР. В таких зеркалах пленка с низким коэффициентом преломления является внешним слоем. Помимо нормальных режимов работы ИТЭР предполагается ряд аварийных режимов, одним из которых является разрушение системы водяного охлаждения первой стенки, дивертора или бланкета. В этом случае вакуумная камера наполняется водяным паром, параметры которого зависят от локализации разрушения и от стадии работы реактора, в которой происходит авария. Максимальные параметры пара задаются специальной системой, которая ограничивает давление величиной 150 кПа, а максимальная температура 250°С может быть в случае, когда авария случается во время вакуумной тренировки камеры. В работе рассмотрены процессы взаимодействия водяного пара с аморфными пленками оксида алюминия, осажденными на стекло марки К-9 методом реактивного магнетронного напыления. Показано, что экспозиция пленки толщиной 300 нм при температуре 250°С и давлении пара 150 кПа в течение 2 часов сопровождается интенсивным гидроксилированием пленки и трансформацией всей массы оксидной пленки в гидроксиды. Это приводит к сильной деградации светопропускания, что может быть причиной изменения оптических свойств диэлектрического зеркала. В качестве продолжения работы планируется испытание в паре зеркал, в которых пленки с низким коэффициентом преломления будут чередоваться с пленками оксидов с высоким коэффициентом преломления, таких как оксиды гафния, тантала и циркония.</p></abstract><trans-abstract xml:lang="en"><p>Aluminum oxide films are used as low refractive index layers in multilayer dielectric mirrors, which are expected to be used in ITER plasma diagnostic optical systems. In such mirrors, a film with a low refractive index is the outer layer. In addition to the normal operating modes of ITER, a number of emergency modes are assumed, one of which is the destruction of the water cooling system of the first wall, divertor or blanket. In this case, the vacuum chamber is filled with steam, the parameters of which depend on the location of the destruction and on the stage of operation of the reactor at which the accident occurs. The maximum steam parameters are set by a special system that limits the pressure to 150 kPa, and the maximum temperature of 250°C can be the case when an accident occurs during vacuum training of the chamber.</p><p>The work examines the interaction of steam with amorphous films of aluminum oxide deposited on glass of the K-9 grades by reactive magnetron sputtering. It has been shown that exposure of a film 300 nm thick at a temperature of 250°C and a steam pressure of 150 kPa for 2 hours is accompanied by intense hydroxylation of the film and the transformation of the entire oxide film into hydroxides. This leads to severe degradation of light transmission, which may cause a change in the optical properties of the dielectric mirror. As a next step, similar steam exposures are planned of the mirrors in which with a low refractive index layers will alternate with layers of oxides with a high refractive index, such as hafnium, tantalum, and zirconium oxides.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>ИТЭР</kwd><kwd>аварийная ситуация прорыв воды</kwd><kwd>пленки оксида и гидроксидов алюминия</kwd></kwd-group><kwd-group xml:lang="en"><kwd>ITER</kwd><kwd>loss cooling accident (LOCA)</kwd><kwd>aluminum oxide and hydroxides films</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">https://ru.wikipedia.org/wiki/Международный_экспериментальный_термоядерный_реактор</mixed-citation><mixed-citation xml:lang="en">https://ru.wikipedia.org/wiki/Международный_экспериментальный_термоядерный_реактор</mixed-citation></citation-alternatives></ref><ref id="cit2"><label>2</label><citation-alternatives><mixed-citation xml:lang="ru">R. 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