For citations:
Gorodetsky A.E., Markin A.V., Bukhovets V.L., Rybkina T.V., Nevolin Yu.M., Zalavutdinov R.Kh. Structure and optical properties of aluminum oxide films (Al2O3) after heating in water vapor and vacuum. Title in english. 2024;(1):87-105. (In Russ.) https://doi.org/10.61852/2949-3412-2024-2-1-87-105